Sigogi na Fasaha:
| Abu | Sigogi |
| Kewayon gwaji | 0.01~6500(cc/㎡.24h) |
| Matsakaicin ƙuduri | 0.001 |
| Yankin saman da ke iya jurewa | 50 c㎡(wasu ya kamata a yi su ne na musamman) |
| Auna diamita na micronucleus | 108*108mm |
| Kauri samfurin | <3 mm (kauri yana buƙatar ƙara kayan haɗi) |
| Samfurin Adadin | 1 |
| Yanayin gwaji | Na'urar firikwensin mai zaman kansa |
| Matsakaicin zafin jiki | 15℃ ~ 55℃ (an sayi na'urar sarrafa zafin jiki daban) |
| Daidaiton sarrafa zafin jiki | ±0.1℃ |
| Mai ɗaukar iskar gas | 99.999% babban tsarkin nitrogen (mai amfani da tushen iska) |
| Gudun iskar gas mai ɗaukar kaya | 0~100 mL/min |
| Matsi daga Tushen Iska | ≥0.2MPa |
| Girman hanyar sadarwa | bututun ƙarfe inci 1/8 |
| Girma | 740mm (L) × 415 mm (W) × 430mm (H) |
| Wutar lantarki | Na'urar AC 220V 50Hz |
| Cikakken nauyi | 50Kg |